Filmetrics? Thin-Film Thickness Measurement Systems
__Filmetrics? Thin-Film Thickness Measurement Systems
__The Filmetrics? F-Series reflectometers deliver high-precision thin-film thickness measurements in seconds. These easy-to-use, affordable thickness measurement tools, combined with intelligent software and a broad range of accessories and configurations, provide maximum versatility in film thickness measurements ranging from 1nm to 3mm.
__ __ __Upcoming Event
View AllEPFL ¨C MicroNanoFabrication Annual Review Meeting
³Ô¹ÏÍø is exhibiting at EPFL ¨C MicroNanoFabrication Annual Review Meeting. We invite you to visit our booth to learn more about our nanoindenter systems.
Event Date | May 13, 2025 |
Location |

Single-Spot Thickness Measurement Systems
Benchtop systems for measuring film thickness and refractive index with a single mouse-click. Measure thicknesses from 1nm - 3mm - even within multilayer film stacks.
Filmetrics? F20 Series Film Thickness Measurement Instruments
Our most popular general-purpose benchtop film thickness and refractive index measurement system.
Filmetrics? F3-sX Film Thickness Measurement Series
Utilizes near infra-red (NIR) light for the thickness measurement of rough and less uniform semiconductor and dielectric layers up to 3mm thick.
Filmetrics? F3-CS Measurement System
Small, portable tool designed for the measurement of coating thickness on small witness samples, such as parylene-coated coupons.
Filmetrics? F10-ARc
Portable reflectometer with internal fiber optics to measure curved surfaces including anti-reflection coatings with a patented long-life, low-power light source. Get color, reflectance, and thin-film thickness measurements in seconds at a fraction of the price.
Filmetrics? F10-HC
Relied on by automotive hardcoat companies around the world to measure hardcoat thickness on flat and curved surfaces. The F10-HC is based on the F20 platform where analysis of spectral reflectance data provides thin-film thickness measurement results quickly.
Filmetrics? F10-AR
Measures reflectance of ophthalmic lenses and other curved surfaces. Options available for transmittance and hardcoat thickness measurement.

Filmetrics? F10-RT Reflectometer
Performs simultaneous measurement of reflectance and transmittance; supports calculations of film thickness and refractive index.
Download BrochureMicroscopic-Spot Thickness Measurement Systems
Film thickness measurement instrument used when a measurement spot as small as 1?m is required - use your own microscope or let us supply the entire measurement system.
Filmetrics? F40 Film Thickness Measurement Instrument
Attaches to your microscope to measure thickness and index in spots as small as 1?m in patterned, curved, and non-uniform samples.
Automated Thickness Mapping Systems
Automated system for mapping of film thickness and refractive index for nearly any sample shape.
Filmetrics? F50 Automated Film Thickness Mapper
Adds automated mapping capabilities to our F20 family of products. Map thickness and index as fast as two points per second.
Filmetrics? F54 Film Thickness Measurement Mapping Instrument
Maps thin-film thickness of samples up to 450mm in diameter as fast as two points per second.
Filmetrics? F54-XY-200 and F54-XY-300 Film Thickness Measurement Mapping Instruments
Maps thin-film thickness of patterned or unpatterned samples up to 200mm x 200mm, or up to 300mm round, as fast as two points per second.
Filmetrics? F60-t Film Thickness Mapping Instrument for Production Environments
Production-ready tabletop thickness mapping system includes on-board reflectance standard, notch finding, interlocked cover, and more.
Filmetrics? F60-c Film Thickness Mapping Instrument for Production Environments
Cassette-to-cassette version of the F60-t.
Inline Thickness Monitoring Systems
Monitor and control thickness of moving films during production. Sample rates as high as 100Hz are possible at multiple measurement locations.

Filmetrics? F30 Thickness Measurement Instrument Series
Monitors reflectance, thickness, and deposition rates during MOCVD, sputtering, and virtually any other deposition process.
Download BrochureFilmetrics? F32 In-Line Thickness Measurement System
Measures deposition rate, film thickness, optical constants and uniformity in real time, with the capability to measure up to 4 spots simultaneously.
Technical Literature
Browse application notes and technical papers from ³Ô¹ÏÍø Instruments Application Engineers and customers, covering a variety of use cases for ³Ô¹ÏÍø Instruments products.
Timeline of Innovation
Starting with the launch of the first thin-film measurement instrument in 1995, Filmetrics technical experts have continued to produce key innovations such as AutoBaseline™, pattern recognition using the film thickness image, and built-in automatic wavelength calibration. For over two decades, the innovative technology and unparalleled application support offered by Filmetrics has provided customers with repeatable and trustworthy measurements for thin-film metrology. Learn more about the rich history of innovation and see why Filmetrics reflectometers are the standard in thin-film measurement.

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