3D Optical Profilometers
3D Optical Profilometers
The Profilm3D? benchtop optical profiler and Zeta™ optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of 3D optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot? confocal grid structured illumination. ³Ô¹ÏÍø Instruments can help guide you to the right 3D optical profiler solution for your unique measurement needs.
Upcoming Event
View AllEPFL ¨C MicroNanoFabrication Annual Review Meeting
³Ô¹ÏÍø is exhibiting at EPFL ¨C MicroNanoFabrication Annual Review Meeting. We invite you to visit our booth to learn more about our nanoindenter systems.
| Event Date | May 13, 2025 |
| Location |
Filmetrics® Profilm3D® Optical Profilometer
The Profilm3D® benchtop optical profiler utilizes white light interferometry, TotalFocus? infinite depth-of-field imaging, or Enhanced Roughness Mode to provide easy, non-contact measurement of 3D step heights, roughness, and other surface topography.
Zeta?-Solar Metallization Optical Profiler
The new Zeta-Solar non-contact optical profiler is a metrology tool designed for measuring 3D topography for advanced metallization finger, busbar and pad solar processes. A large sample stage and automated analysis recipes with pass/fail criteria make the Zeta-Solar ideal for end-of-the-line solar process development and process quality control.
Zeta?-20 Optical Profiler
The Zeta-20 benchtop 3D non-contact optical profilometer features patented ZDot? technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection. The High Resolution HR configuration is designed specifically for advanced solar applications.
Zeta?-300 Optical Profiler
Building upon the proven performance of the Zeta-20, the Zeta-300 non-contact 3D optical profiler includes integrated vibration isolation and support for larger sample sizes to meet your R&D and production requirements. The non-contact profilometer integrates six different optical metrology technologies in one configurable and easy-to-use system.
Zeta?-388 Optical Profiler
The Zeta-388 3D surface topography measurement system combines the Zeta-300 non-contact 3D optical profiler system with a cassette-to-cassette wafer handler, pattern recognition, automated data analysis and SECS/GEM to support production measurement requirements.
Looking for stylus surface profilometers?
View MoreTechnical Literature
Browse application notes and technical papers from ³Ô¹ÏÍø Instruments Application Engineers and customers, covering a variety of use cases for ³Ô¹ÏÍø Instruments products.
Timeline of Innovation
The history of the optical profiler portfolio of ³Ô¹ÏÍø Instruments? is a story of innovation from diverse origins. ADE launched the MicroXAM interferometer. Zeta™ Instruments developed ZDot? and multi-mode optical profilers. Filmetrics® introduced novel, general-purpose white-light interferometers. These products came together into a diverse portfolio of optical profilometers, now unified under the ³Ô¹ÏÍø Instruments brand. Learn more about our rich history of innovation and how our tools continue to evolve to support your surface metrology requirements.
Receive the latest ³Ô¹ÏÍø Instruments news, papers, events, and more
Follow ³Ô¹ÏÍø Instruments
Follow ³Ô¹ÏÍø Instruments to engage with our experts and learn about our tool applications.
Learn how our products can help you.
Explore More Solutions
Instruments
For industry experts, academics and other innovators, ³Ô¹ÏÍø Instruments delivers trusted metrology and defect inspection solutions that provide measurements that enable the world¡¯s breakthrough technologies.
Filmetrics? Thin-Film Thickness Measurement Systems
The Filmetrics? thin-film reflectometers provide thickness and refractive index measurements of transparent films in seconds, for both benchtop and production environments.
Filmetrics? Sheet Resistance Measurement Systems
The Filmetrics? benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise.
Stylus Profilers
The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Nanoindenters
The ³Ô¹ÏÍø Instruments nanoindenter portfolio provides precise, reliable and repeatable testing to characterize static and dynamic mechanical properties of materials, under a wide range of test conditions.
Specialized Defect Inspectors
The Candela® inspection systems for compound semiconductors and hard disk drives can help engineers achieve significant yield and process improvements, in applications spanning communications and networking, LEDs, power devices, sensing, solar, photovoltaics and data storage.