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Process Control

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Semiconductor process equipment manufacturers use ³Ô¹ÏÍø¡¯s process control systems to understand process quality and to optimize tool performance. Used during process and tool development, ³Ô¹ÏÍø¡¯s process control systems produce information used to visualize, diagnose and control process conditions ¨C enabling the equipment manufacturers to fully characterize and understand their tools¡¯ performance. Our inspection, metrology and in situ process monitoring solutions are also used to qualify process tool performance before shipment. ³Ô¹ÏÍø¡¯s process control systems help equipment suppliers build reliable, production-worthy process tools.

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Process Control Products

³Ô¹ÏÍø¡¯s comprehensive portfolio of process control products for Chip Manufacturing also support development and production of process tools for the semiconductor ecosystem. Our products that support process equipment manufacturers include:

  • Surfscan? unpatterned wafer inspection systems
  • SensArray? in situ process monitoring solutions
  • SpectraFilm? films metrology systems
  • Axion? X-ray critical dimension (CD) and shape metrology system
  • SpectraShape? optical critical dimension (CD) and shape metrology systems
  • And more...

Learn about our products available for semiconductor process equipment manufacturers in our Defect Inspection and Review, Metrology and In Situ Process Management product categories.

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