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Introduction to physical vapor deposition (PVD) of AlN or AlScN for BAW filters or piezoMEMS. Our Sigma^? fxP offers significant benefits with respect to cross-wafer thickness uniformity, film stress control and elimination of crystalline defects in the AlN film. Scandium is added to improve the piezoelectric performance of AlN, but this makes PVD more challenging. This video shows how SPTS has developed unique technologies to enable successful deposition of highly doped AlScN films.